ULTRA-HIGH PURITY GASES FOR SEMICONDUCTOR FABRICATION

Semiconductor Industry

Ultra-high purity gases are critical to semiconductor fabrication, where specifications are amongst the most challenging. Common gases are nitrogen, helium, hydrogen and argon, with suppliers aiming for product quality 6.0 (99.9999% purity). For moisture analysis, this means a maximum impurity of 20 ppbV.

With such demanding measurement criteria, it pays for analysis to not only be fast and sensitive, but also underpinned by traceable calibration standards. Ask about how MCM’s work in standards can bring confidence to your trace-level moisture measurement.